- Room Number: I06.U1.401d
- Tel.: 2149
Accelerating voltage: 0.02 to 30kV
Resolution:
- 0.8 nm @ 15 kV
- 1.6 nm @ 1 kV
- 0.8 nm @ 30 kV (STEM mode)
Probe current: up to 20nA
Vacuum modes:
- High Vacuum
- Variable pressure up to 60 Pa
Detectors:
- High efficiency secondary electron detector HE-SE2 – Everhart-Thornley type
- In-lens Duo detector – combination of In-lens SE and In-lens BSE imaging
- Scanning transmission electron microscopy detector
- Variable pressure secondary electron detector
- Cathodoluminescence detector for material characterization
- EDS detector: Octane Elite EDS System with 70 mm2 chip and silicon nitride (Si3N4) window; APEX SW
5-axes mot. eucentric stage with dual joystick controller
Plasma Cleaner for gentle removal of sample contamination
Local Charge Compensation for undisturbed imaging of non-conductive samples and in situ cleaning of sample surface
Cooling stage (up to -25°C)
ATLAS Array Tomography for 3D reconstruction of sample data
SEM Merlin booking and general rules
